Measurements: Flatness – parallelism

Tropel interferometer can perform measurements of slices up to 200 mm with a 50 nm accuracy:

• Flatness: bow, warp, Sori…
• Parallelism: TTV, LTV…

Slice specification: transparent or semi-opaque, polished or not, up to several millimetres thick.
The software offers numerous raw data processing types to highlight relevant information.

Measurements on round wafers 2 to 6 in

 Surface texture and optical flatness measurements
 

Altisurf 520 can perform surface texture and flatness metrology.

This profilometer can perform measurements using several technologies: chromatic confocal, white light interferometry, both associated with a high-resolution CCD camera.
An optional double rotary axis can be added to this metrology station to address the different needs.

Altimet 520. Optical geometric and dimensional measurements

Table X-Y  200x200mm

Accuracy: flatness 0.3 µm, Ra down to 3 nm

 Material structural characterization
 

The X-ray diffractometer Rigaku Smartlab is a 4 circles diffractometer especially fitted for single crystals and epilayers characterizations : miscut measurements, crystalline quality, recicprocal space map… It includes a Ge(220) channel cut for the preparation of the beam. The diffractometer can as well be configured for powder measurement.

Optical geometric and dimensional measurements

The IM-7000 Series (Instant Measurement System) profile measurement system is an automatic 2D measuring machine combining high accuracy and ease-of-use.

• Measurement up to 200 mm, ± 2 µm or ± 5 µm (depending on the dynamic range)
• Autonomous and digital:999 measurements performed in a few seconds
• No inaccuracy of measurement due to the operator
• Automatically generated inspection reports including statistical values

Crystallographic orientation measurements

The orientation of the cut crystalline samples can be verified with an X-ray goniometer using Bragg’s law. The absolute accuracy range is one minute of angle, but the measurement repeatability is of 10 arc seconds.

• All types of crystals
  
• Single-rotated or double-rotated cut
  

Physical properties measurements: on request
Elastic, piezoelectric and dielectric constants