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Collaborative European Technology Platform for innovation

CHARACTERIZATIONS

Dimensional, geometric,
and physical characterization

Measurements: Flatness – parallelism

Tropel interferometer can perform measurements of slices up to 200 mm with a 50 nm accuracy:

  • Flatness: bow, warp, Sori…
  • Parallelism: TTV, LTV…

Slice specification: transparent or semi-opaque, polished or not, up to several millimetres thick.
The software offers numerous raw data processing types to highlight relevant information.

Measurements on round wafers 2 to 6 in

MEASUREMENTS: FLATNESS – PARALLELISM tropel cristal innov
Tropel interferometer cristal Innov

 Surface texture and optical flatness measurements
 

Altisurf 520 can perform surface texture and flatness metrology.

This profilometer can perform measurements using several technologies: chromatic confocal, white light interferometry, both associated with a high-resolution CCD camera.
An optional double rotary axis can be added to this metrology station to address the different needs.

Altimet 520. Optical geometric and dimensional measurements

Table X-Y  200x200mm

Accuracy: flatness 0.3 µm, Ra down to 3 nm

Altimet 520. Optical geometric and dimensional measurements
 SURFACE TEXTURE AND OPTICAL FLATNESS MEASUREMENTS cristal innov

 Material structural characterization
 

The X-ray diffractometer Rigaku Smartlab is a 4 circles diffractometer especially fitted for single crystals and epilayers characterizations : miscut measurements, crystalline quality, recicprocal space map… It includes a Ge(220) channel cut for the preparation of the beam. The diffractometer can as well be configured for powder measurement.

The X-ray diffractometer Rigaku Smartlab cristal innov
The X-ray diffractometer Rigaku Smartlab
The X-ray diffractometer Rigaku Smartlab cristal innov

Optical geometric and dimensional measurements

The IM-7000 Series (Instant Measurement System) profile measurement system is an automatic 2D measuring machine combining high accuracy and ease-of-use.

  • Measurement up to 200 mm, ± 2 µm or ± 5 µm (depending on the dynamic range)
  • Autonomous and digital:999 measurements performed in a few seconds
  • No inaccuracy of measurement due to the operator
  • Automatically generated inspection reports including statistical values
Optical geometric and dimensional measurements
Crystallographic orientation measurements keyence

Crystallographic orientation measurements

The orientation of the cut crystalline samples can be verified with an X-ray goniometer using Bragg’s law. The absolute accuracy range is one minute of angle, but the measurement repeatability is of 10 arc seconds.

  • All types of crystals
  • Single-rotated or double-rotated cut
Crystallographic orientation measurements

Physical properties measurements: on request
Elastic, piezoelectric and dielectric constants
MESURES PHYSIQUES:  SUR PROJETS CONSTANTES ÉLASTIQUES, PIÉZOÉLECTRIQUES, DIÉLECTRIQUES…