and physical characterization
Measurements: Flatness – parallelism
Tropel interferometer can perform measurements of slices up to 200 mm with a 50 nm accuracy:
- Flatness: bow, warp, Sori…
- Parallelism: TTV, LTV…
Slice specification: transparent or semi-opaque, polished or not, up to several millimetres thick. The software offers numerous raw data processing types to highlight relevant information.
Measurements on round wafers 2 to 6 in
Surface texture and optical flatness measurements
Altisurf 520 can perform surface texture and flatness metrology.
This profilometer can perform measurements using several technologies: chromatic confocal, white light interferometry, both associated with a high-resolution CCD camera.
An optional double rotary axis can be added to this metrology station to address the different needs.
Altimet 520. Optical geometric and dimensional measurements
Table X-Y 200x200mm
Accuracy: flatness 0.3 µm, Ra down to 3 nm
Optical geometric and dimensional measurements
The IM-7000 Series (Instant Measurement System) profile measurement system is an automatic 2D measuring machine combining high accuracy and ease-of-use.
- Measurement up to 200 mm, ± 2 µm or ± 5 µm (depending on the dynamic range)
- Autonomous and digital:999 measurements performed in a few seconds
- No inaccuracy of measurement due to the operator
- Automatically generated inspection reports including statistical values
Crystallographic orientation measurements
The orientation of the cut crystalline samples can be verified with an X-ray goniometer using Bragg’s law. The absolute accuracy range is one minute of angle, but the measurement repeatability is of 10 arc seconds.
- All types of crystals
- Single-rotated or double-rotated cut