CHARACTERIZATIONS
Dimensional, geometric,
and physical characterization
Measurements: Flatness – parallelism
Tropel interferometer can perform measurements of slices up to 200 mm with a 50 nm accuracy:
- Flatness: bow, warp, Sori…
- Parallelism: TTV, LTV…
Slice specification: transparent or semi-opaque, polished or not, up to several millimetres thick. The software offers numerous raw data processing types to highlight relevant information.
Measurements on round wafers 2 to 6 in
![MEASUREMENTS: FLATNESS – PARALLELISM tropel cristal innov](/templates/yootheme/cache/f1/MESURES-PLANEITE-PARALLELISME-tropel-f17beb4b.jpeg)
![Tropel interferometer cristal Innov](/templates/yootheme/cache/d6/interferometre-Tropel-cristal-innov-d6bd298c.jpeg)
Surface texture and optical flatness measurements
Altisurf 520 can perform surface texture and flatness metrology.
This profilometer can perform measurements using several technologies: chromatic confocal, white light interferometry, both associated with a high-resolution CCD camera.
An optional double rotary axis can be added to this metrology station to address the different needs.
Altimet 520. Optical geometric and dimensional measurements
Table X-Y 200x200mm
Accuracy: flatness 0.3 µm, Ra down to 3 nm
![Altimet 520. Optical geometric and dimensional measurements](/templates/yootheme/cache/44/Altimet-520-Profilometre-cristal-innov-44cd9e36.jpeg)
![SURFACE TEXTURE AND OPTICAL FLATNESS MEASUREMENTS cristal innov](/templates/yootheme/cache/83/MESURES-ETAT-SURFACE-PLANEITE-OPTIQUES-altisurf-839a11f1.jpeg)
Material structural characterization
The X-ray diffractometer Rigaku Smartlab is a 4 circles diffractometer especially fitted for single crystals and epilayers characterizations : miscut measurements, crystalline quality, recicprocal space map… It includes a Ge(220) channel cut for the preparation of the beam. The diffractometer can as well be configured for powder measurement.
![The X-ray diffractometer Rigaku Smartlab cristal innov](/templates/yootheme/cache/bd/diffracto-xray-spectrum-cristal-innovt-bd7fb815.png)
![The X-ray diffractometer Rigaku Smartlab](/templates/yootheme/cache/01/diffracto-Rigaku2-cistal-innov-014e02c7.jpeg)
![The X-ray diffractometer Rigaku Smartlab cristal innov](/templates/yootheme/cache/56/diffracto-graph-cristal-innov-56e90937.jpeg)
Optical geometric and dimensional measurements
The IM-7000 Series (Instant Measurement System) profile measurement system is an automatic 2D measuring machine combining high accuracy and ease-of-use.
- Measurement up to 200 mm, ± 2 µm or ± 5 µm (depending on the dynamic range)
- Autonomous and digital:999 measurements performed in a few seconds
- No inaccuracy of measurement due to the operator
- Automatically generated inspection reports including statistical values
![Optical geometric and dimensional measurements](/templates/yootheme/cache/a4/MESURES-GEOMETRIQUES-DIMENSIONNELLES-OPTIQUES-keyence-a45afa77.jpeg)
![Crystallographic orientation measurements keyence](/templates/yootheme/cache/34/keyence-cristal-innov-34cb5acc.jpeg)
Crystallographic orientation measurements
The orientation of the cut crystalline samples can be verified with an X-ray goniometer using Bragg’s law. The absolute accuracy range is one minute of angle, but the measurement repeatability is of 10 arc seconds.
- All types of crystals
- Single-rotated or double-rotated cut
![Crystallographic orientation measurements](/templates/yootheme/cache/e0/goniometre-rayonx-cristal-innov-e0fdea46.jpeg)
Physical properties measurements: on request
Elastic, piezoelectric and dielectric constants
![MESURES PHYSIQUES: SUR PROJETS CONSTANTES ÉLASTIQUES, PIÉZOÉLECTRIQUES, DIÉLECTRIQUES…](/templates/yootheme/cache/10/Constantes-physiques-physical-constants-cristal-innov-10e4a4b0.jpeg)